1. Characteristics Real-time chemical concentration monitoring Wet process analyzer for FPD and semiconductor UV-VIS-NIR spectroscopy Cost down effect due to the control of the chemical supply Time saving effect with process recipe Non-contact optical system for chemical concentration monitoring Flow rate control valve, flow meter or volume pump can keep the adding solution system Increased yield rate 2.Applications Analysis of compound, Check the semiconductor process
Country | Republic of Korea | Tel | |
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URL | http://www.pimacs.co.kr |